[introduction] village cropland (Murata) it is a global integrated electron yuan manufacturer of parts of an apparatus, the electron that basically is engaged in be a foundation with pottery and porcelain yuan the development of parts of an apparatus, production and marketing. 2012, village cropland buys VTI Technologies Oy of manufacturer of Finnish MEMS sensor all current and outer equity, issue VTI offer subsidiary cavalcade for the banner, in order to enlarge domain of MEMS technology career, the research and development that strengthens car in order to and medical treatment to use sensor and make. Product of village cropland MEMS includes sensor of accelerometer, gyroscope, magnetism, pressure sensor to wait.

Village cropland (Murata) it is a global integrated electron yuan manufacturer of parts of an apparatus, the electron that basically is engaged in be a foundation with pottery and porcelain yuan the development of parts of an apparatus, production and marketing. 2012, village cropland buys VTI Technologies Oy of manufacturer of Finnish MEMS sensor all current and outer equity, issue VTI offer subsidiary cavalcade for the banner, in order to enlarge domain of MEMS technology career, the research and development that strengthens car in order to and medical treatment to use sensor and make. Product of village cropland MEMS includes sensor of accelerometer, gyroscope, magnetism, pressure sensor to wait.

Seek advice from the introduction according to Maimusi, SCHA634 is step of plan of village cropland car 6 axes MEMS is inertial measure unit (IMU) , can pass with GNSS (system of global navigation satellite) , photograph the data confluence that waits for all sorts of sensor like radar of head, millimeter wave, lidar, implementation ADAS (advanced drive support system) reach AD (drive automatically) function. This product is in 0 slant stability and noise respect have an advantage, can satisfy the function requirement that car security uses. Village cropland still measures orthogonal sex of the axis to undertake calibration to sensor, make a system compositive business but skip over this one high cost and the processing move that has high demand to the operation.

IMU is to measure an object part of 3 axes stance (or horny rate) and the device of acceleration. Normally, IMU interior is compositive 3 axes gyroscope and 3 axes accelerometer, and motion / attitude is algorithmic. If IMU is in-house compositive sensor uses MEMS technology implementation, can be called so MEMS IMU.

The village cropland that this report is aimed at global sell like hot cakes MEMS IMU product ” SCHA634-D01 ” undertake physics is analysed, include parts of an apparatus to tear open solution, chip to analyse reach data analysis to wait, figure a MEMS chip workmanship and parts of an apparatus enclose craft. Finally, we retrieve and analysed product patent case. Specific as follows:

Undertake to SCHA634 optics is become above all resemble be being become with X ray picture, obtain whole to enclose with down-lead information: 32 make integrated circuit of crural small exterior (SOIC) enclose a form, enclose dimension to be 19.71mm X 12.15mm X 4.5mm, enclose interior to share 82 down-lead (Bonding Wire) , 4 MEMS chip and 2 ASIC chip use 3D pile means compositive at enclosing.

Village cropland MEMS IMU SCHA634 encloses dimension

Village cropland MEMS IMU SCHA634 opens a lid to reveal

Undertake parts of an apparatus machinery unseals next go with chemistry glue, take out 6 among them chip to undertake thorough analysis, include layer of structure of layer of underlay of ASIC circuit layer, MEMS, MEMS, MEMS to build class of circle of cap layer, brilliant to enclose reach bond to wait, the 3 axes sense that offers MEMS accelerometer and MEMS gyroscope respectively measures structure and drive to comb dimension of the local close-up of tine structure, feature reachs important material information.

The circuit of village cropland MEMS IMU SCHA634 (ASIC) chip SEM photograph

The photograph of SEM of chip of Z axis gyroscope of village cropland MEMS IMU SCHA634

According to afore-mentioned 4 MEMS chip (3 sort: X/Y axis gyroscope, Z axis gyroscope and 3 axes accelerometer) the structure is analysed reach data analysis, scale gives sketch map of MEMS chip structure, it is a speculation to give MEMS workmanship flow with X/Y axis gyroscope. In addition, this report still offerred parts of an apparatus to enclose technological process.

The give typical examples of part of MEMS chip technological process of village cropland MEMS IMU SCHA634

To SCHA634 product relevant patent undertakes retrieval finally with the analysis, offer patent to concern to the map of the product, conduce to other firm understanding technical point and patent protection scope, undertake the gender analyses tort correlation, can avoid the happening of tort dispute effectively thereby.

The give typical examples of accelerometer patent map of village cropland MEMS IMU SCHA634

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