Rather heMakeIndustry posture is compared, of semiconductor chipMake, can saying is to be close to industry most 4 wish the manufacturing industry of scene. But even if is such, in artificial intelligence (AI) , machine study (below the concussion of the new technology tide such as ML) , semiconductor is madeEquipmentThe industry still needs with when into. SemiconductorEquipmentIndustrial future must innovate in coordination, break data to string together drifting barrier, fangke lets semiconductor equipment enter next generation.

The world that our body manages is being changed ceaselessly. In fact, science and technology is making progress at full speed with the diploid pace of exponential function. The rate of exponential level change that brings as a result of net border network, plus rub the exponential level of Er law grows footstep, let us be faced with so unprecedented, master hard, and the rapid change of fast Lei Ban.

Not only such, machine study and artificial intelligence (the tide of AI) is being swept across and come, include manufacturing industry, all trades and professions will be destroyed the overall impact that type innovates.

Big data / deepness study drives semiconductor equipment node is changed

In the past, semiconductor equipment line of business personSaleMake ChengEquipment gives brilliant round plant, include housing (Chamber) , controller. These equipment can with lead plane communication, the number that attends machine stage gives lead plane as it is said, accumulate a database then. Pass through the database that build place, the user of semiconductor equipment tries to understand and apply pick from equipment the data that takes, but these databases remain fragmentary, half-baked, because regular meeting has a few information,hide at machine stage in.

To masterMake Chengthe feature undertakes programmed control is made effectively making, brilliant round factory must carry out measure an amount to increasing quickly. However, a lot of picking take measure a value, making Cheng case to understanding is not so useful, because information is insufficient complete. Accordingly, what can anticipate is, brilliant round factory of future won’t use what block informationHardwareEquipment.

For because answer this trend, division forest research and development (the node that Lam Research) already tried to turn every fixture into the network to go up. Machine stage data will perform algorithmic union with ego study, these figure laws can use relevant part, measure (Metrology) , upper reaches and make Cheng downstream, and component andFine rateWait for all data. Information can follow stage of machine of brilliant round pass in and out, and all data that make Cheng will be collected by sensor, record, and with proper form, undertake transmission in right time, in order to offer rigid control.

On ideal, network node should have the following character:

. Provide ego to feel (Self-aware) and ego control function.

. Know when to need to maintain.

. Can undertake according to the condition of wrong result ego is amended, will stabilize result andFine rate, then willProductionPower is the greatest change with reduceCost.

This is one is built in big data (law of figure of Big Data) , deepness study, and make Cheng special change (over Process Specialization) foundation baronial wish scene, also be semiconductor equipment intelligence changes further upward cornerstone.

It is with housing equipment exemple, this kind of equipment makes the central node of Cheng as semiconductor, besides use when station machine stage (outside the data of At-the Tool) , the data of Cheng equipment is made downstream on union even, the person that ability lets use masters the exact state that makes Cheng, for exampleEtchThe adjustment of temperature, the meeting is right whole the impact that makes Cheng cause. Of division forest wish scene it is to develop the device that issues equipment ego to feel ability, make its make the one ring in the network.

6 old techniques realize intelligent semiconductor equipment

Want to realize egoDrive(Round equipment of Self-driving) or intelligence brilliant, the following the technology of 6 domains will act important role.

Data set is knitted (Data Organization)

To equipment supplier and its client, the data that obtains machine Taichun is the initial drop of whole system. But, every brilliant round plant is endless and same, and every client hopes to obtain more data as far as possible, the data analysis of every client and the means that build place also differs severally.

With exemple of division Lin Wei, its practice is to establish an interpose range, can provide the flexibility that client place wants. Pass through standard API, the client can access machine stage data all sorts of model voice, speed and amount, protect the integrality that has data at the same time.

The client picks from machine stage after taking data, need manages data further, and its conformity arrives in brilliant round factory. In the light of how to manage data, equipment supplier faced all sorts of diverse client demand once more. Some clients ask to put data in his system, some requirements are put in the system of equipment supplier, some hopes use compound means, still brilliant round factory hopes to put data in high in the clouds.

Platform of study of big data machine

To satisfy the client’s sundry requirement, division forest develops a platform of purpose, make its can serve as conduit or store database, use the industry standard unit with the same system that uses with nowadays to have data government, boost communication level conformity and offer over or across is all the huge volume mood of stage of division forest machine controls capacity, make its are in execute on can bouncier. Come so, the client can choose them to think used way in platform from now on.

Besides establish the figure standard that can cross data rationalize and management machine desk besides, these figure laws are returned must can undertake updating continuously. Establish a standard, so that can stabilize the ground to use tripartite reliablySoftwareIt is very important, what does the Qing Dynasty that need a unit of monthly interest rate work to should go up in machine stage or be carried out in Wrapper environment.

Automation

Want to reduce chip through automationProductionOperational variability, a lot of measure must want a consideration. E.g. , we need to use machine study to analyse data, sense component difference (Component Drift) and mode, so that can be moved afresh school (the Re-tune) , background that uses component and subsystem identifies (breakdown of spare parts of the model that Context Identification) will come to trace condition of health of subsystem of utilization rate, development and component service life, monitoring and inchoate breakdown, implement automationHardwareAttestation, corrective, set and difficulty eliminate.

E.g. , in the course that produces in chip, a lot of time are to use those who affirm whether housing already achieved stability to make Cheng requirement. No matter beEtchHousing or deposit equipment, expend the time that acknowledges in housing condition the metropolis is longer and longer.

It is the problem that machine stage maintenance and spare parts change next. To implement automation preventive safeguard, what we must understand a system is current condition, and borrow by the amount that increases sensor, will be informed a spare parts when to be about breakdown.

Change the spare parts is difficulty. Sheet is the which spare parts in knowing equipment, this looks seem simple work, becoming have challenge sex more and more. The serial number that this is input spare parts not only just, it still needs to understand is which spare parts, ability lets model and node be compensated for its.

However, the person that use can formulate strategy in the light of equipment itself. Change automatically for example spare parts, the means that uses high automation undertakes maintenance, promote productivity then.

Sensor and make programmed control

A lot of event that produce on machine stage at present can restrict his productivity and the function that make Cheng. We can be aimed at monitoring content, how to analyse data data, and how to pass through use sensor to obtain the project such as conclusion to improve this one condition quickly. We want to use onefold the information that its upper reaches reachs to make Cheng place be collected during making Cheng will make instant and decision-making. Sensor increases on equipment, can obtain more information, use control to measure yield brilliant circle actually.

The control that make Cheng is costly. Circle factory must obtain brilliant to measure information in great quantities, ability understands the situation that make Cheng, and what need measure information to be met only increasing, won’t become little. Expenses of brilliant round plant makes an appointment with the budget of 9% to be in measure with the control that make Cheng. Want to obtainStructureCharacteristic description, the likelihood must want to pick the TEM that takes on 1000 pieces is video will undertake an analysis. But, because noise is mixedCharacterWait for an element, make an appointment with those who have 80% to measure data to cannot be used normally.

Because undertake measuring requires skillCostIncrease increasingly, if we cannot find out a solution, realize more measuring with lower cost, so the problem that industry situation is sure to be faced with economic benefits. Because of this, division forest is making Cheng and upper reaches or the usable information that make Cheng downstream through integrated brilliant circle, will get the effective control of stability answers a circle making Cheng, such ability reduces measured cost further.

Want to achieve the challenge of this target to depend on, equipment supplier needs to link interior (yuan of different always promotion productivity such as In Situ) big data and analysis, with different type forward with feedback control and relevant figure law reduce variability, and the influence that understanding adjusts the different parameter on stage of the machine that make Cheng to be able to be brought.

Fictitious processing? (Virtual Processing)

The model of especially custom-built Cheng that if we can be corrective,represents housing efficiency, so use an experiment to design when the client (DoE) will develop when making Cheng, can eliminate afore-mentioned those expend a large number of energy, however the exercise of make a futile effort.

relatively go up 1000 times at measuringStructureOr on 1000 pieces TEM is video, we are inferior to using fictitious processing, measure 1 million pieces of TEM with shorter time. We are OK the frequency of the structure that postmortem blame measures, know the effect that the housing that make Cheng causes to whole component layout. We still can expand this function, make we can be mixed from small film at the same time etch come to what postmortem differs make Cheng effect, because this can take more careful kind,will realize a model assist (Model-assisted) controls Cheng development.

Advanced productivity solution

Should offer these advanced device control character and difficulty to eliminate, maintenanceCharacterManage with automation, intelligence data, and far end monitoring, let integral equipment efficiency then (OEE) achieves maximize, serve hang on withSoftwareHelp complete ecosystem.

It is with division forest itself exemple, this company already built very corresponding organization structure, will expand continuously its function, in order to boost prospective serviceFrame, offer for machine stage not only assist, it is its change the node on the network even.

Example jib: Cooperate in coordination / drive innovate

Can offer without single company after all all solutions of its result. In the intelligent network that crosses brilliant round factory, regarding an intelligence as node machine stage is grand wish far scene, must want conformity the technology of each company and core competition advantage.

The success of this one target, hang on group cooperates. Want to execute each mission in this complex environment, cooperate in coordination innovation will be crucial. But, cooperate in coordination innovation is not so easy however. The most difficult question that the member in zoology department must answer is, what course of study person need to be in charge of what job, and how should we share value. We answer how with client, supplier, partner, and even competitor, come to those who promote industry cooperate in coordination?

It is at present related semiconductor equipment domain, still have a lot of controversy afoot that concern with data, need undertakes detailed assessment, ability li is clear each family property person how should share data, with period the solution that can give place to need for joint client development. Future, in the light of cooperate in coordination innovation, industry will have more standard course of action appears.

Division forest has completed research and development the primary job of these standards, and lead industry pass through sensorInvestmentIncrease, fictitious processing, big dataFrameworkWith management, software and control, platform and robot, and advanced service, enter ” intelligent equipment ” for generations. Pass through the coact of industry, we will promote innovation continuously, make this advancedly Cheng wish scene the client that brings us.