As artificial intelligence (AI) generation comes, demand of efficient operation chip will grow ceaselessly, but at present tungsten of semiconductor former stock already faced physical maximum with copper, material of application of plant of equipment of the biggest semiconductor announces the whole world, roll out cobaltic metal to regard 7 accept as riceMake ChengThe following conductor, promote chip efficiency.

Artificial intelligence and big data times come, chip also must be passed through ceaseless small shrink promotion efficiency, if where 10 accept riceMake ChengThe followingProductionGive efficiency report of taller, bad news fewer, area is smaller reach lowCostthe main task that chip makes current semiconductor make Cheng go up.

Use material explanation, in PC times, the electric crystal of chipStructureGive priority to with plane, scarce conformity material, use small film to have chip small shrink, can make chip efficiency promotion and bad news report fewer wait for a requirement so, wait to action communication as times progress nevertheless, the client begins affiliated to a ministry to aim design oneself picture, from alignment fourfold design is drawn, and apply extremely ultraviolet light (EUV) continue small shrink, chip efficiency gain begins slow down, CostEfficiency also is reduced.

Accompany rub below the foot of Er law, the most advanced now semiconductor makes Cheng had entered grade of 7 accept rice, be in nevertheless chip is ceaseless small shrink, partial conductor is like tungsten and copper under Cheng of 10 pay the metric system already cannot successful small shrink, use material explanation, because its report sex is in,electric crystal contact and lead of local terminal metal make Cheng had approached physical limit, original tungsten and copper also cannot guide again become interface, this also makes crystal of fin form report (FinFET) the bottleneck that cannot develop efficiency completely.

Applied material points out, cobaltic metal is eliminating this bottleneck, it is the technical turn of conductor with cobaltic metal, drive rub Er law goes downward continuously, at present cobalt has been passedTest and verifyCan apply to a large number ofMake, cobalt is in narrow the low resistance character that the line is apart from place to show improves power comsumption effectively, let material project can last small shrink, and the height that applied material offers optimizes deposit, temper, evenness to change the technology that make Cheng to be able to reduce cost and improvementFine rate.

In fact, applied material affects with collaboration of stage accumulating report close together, stage accumulating report is at present advanced supply by applied material almost on the crucial equipment that makes Cheng and material, because this accumulates report to make Cheng as the stage ceaseless small shrink, applied material also will be expected to last indebted.